This course will provide students with the skills to maintain ESI-Model 9850 systems in production and R&D environments. Instruction includes: system layout, operation, and safety; all calibrations; and use of the hardware and software support tools used to test and verify proper operation of the 9850 major sub-systems. Course is divided between morning lectures and afternoon labs and is centered around completing all required calibrations for the system.
Instruction methods used include:
Users responsible for system maintenance and troubleshooting.
Users responsible for device setup and optimization.
Users who wish to review their existing system maintenance techniques, and application optimization knowledge.
Perform preventive maintenance as documented to maintain system performance.
Use System Diagnostic Software to adjust and troubleshoot the system.
Complete the 9850 Preventive Maintenance procedures.
Standards: System must meet published calibration and verification standards as written in the 9850 SAT.
Day 1: System Overviews
Day 2: Wafer Handler
Day 3: Calibrations
Day 4: Calibrations (cont)