The 9850UV produces a 0.8-um spot size by utilizing ESI's 100-kHz UV laser and state-of the-art optics design, which was developed specifically for advanced DRAM and NAND Flash applications.

• The system is able to process incredibly small link pitches and can process two banks of links in parallel due to the proprietary dual-beam architecture—providing potential throughput improvements of up to 90 percent when compared with conventional laser repair systems.

• The large-field 98XX platform minimizes alignment, stepping and other overhead factors that impact throughput, while auto-adjusting optics keep optical components perfectly aligned for optimal process performance and highest productivity.
   

• ESI's 9850UV system provides the smallest spot-size capability available for industry-leading accuracy and maximum yield.