LED Wafer Scriber

ESI’s AccuScribe LED laser scriber pioneered the way for the LED customers with the disruptive technology to reduce the costs of ownership for LED manufacturing over traditional diamond scribing. With the patented technology in Sapphire scribing, the family of AccuScribe systems are the benchmark solutions for precision laser beam control scribing at high wafer throughputs in the industry.

The AccuScribe systems continue to meet requirements from R&D to High Volume Manufacturing applications offering flexible laser processing of Regular, High-Brightness and Ultra-High Brightness LED’s with the highest scribe control for superior yield critical for LED manufacturers.

Products

The AccuScribeTM 2210 is a production-proven, high-throughput laser scribing solution for LED manufacturing. Up to 18 wafers per hour can be achieved for superior productivity and significant reduction in cost of ownership with high system reliability. Process extendibility enables customers to leverage the system for multiple product classes

The AccuScribeTM 2600 is the most advanced tech­nology, high-performance laser scribing solution for high brightness LED manufacturing (HB-LED). Supporting light enhancement technologies, like patterned sapphire substrate (PSS), sidewall etch (SWE) and distrib­uted Bragg reflector (DBR) with metal mirror, the AccuScribe 2600 enables customers to extract the maximum light output from their LED devices