The Model Si5330 is a heavy-duty solution optimized for precision high-aspect-ratio controlled-depth and through vias in silicon.
The system is an extension of the 5300 family of tools, of which hundreds are deployed globally.
The si5330 micromachining system employs a high-power UV laser capable of rapidly drilling and routing in most semiconductors.
Via drill rates of up to 2000 via per second are achievable, depending on the material’s thickness and via size.
Datasheet
System Quotation
System Demo
Additional Applications and Configurations
System Upgrade and Expansion